Advanced Data Analysis Strategies for Understanding Particle Contamination in Chemical Distribution Systems

David Green; Dan Rodier

doi:10.4028/www.scientific.net/SSP.282.314

Paper Titles

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Influence of VPT Treatment on Microscopic Distribution of Trace Metal Contaminants and its Effect on TXRF Measurement
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Determination of HCl Transport Coefficients in Real FOUP Polymers for HCl Cross-Contamination Assessment from FOUP to Wafer
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Advanced Data Analysis Strategies for Understanding Particle Contamination in Chemical Distribution Systems

Abstract:

Advanced data analysis techniques can be implemented to quantitatively assess particle contamination data in state-of-the-art chemical distribution systems. Through examining the distribution of the rate of particle detection compared to Poisson’s distribution, it is possible to determine if particle variations are random or systematic and allow for the focus of improvement efforts to reduce particle levels with time. By analyzing the particle contamination data in the frequency domain via Fourier transform analyses, periodic cycles of contamination can be identified with the goal of associating contamination events with activities within the chemical delivery system.

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Periodical:

Solid State Phenomena (Volume 282)

Pages:

314-320

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.282.314

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Online since:

August 2018

Authors:

David Green, Dan Rodier

Keywords:

Chemical Distribution, Data Analysis, Particle Counting

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References

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