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HomeSolid State PhenomenaSolid State Phenomena Vols. 37-38

Solid State Phenomena Vols. 37-38

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.37-38

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Table of Contents

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Paper Title Page

Beam Shape Effects with Excimer Laser Crystallisation of Plasma Enhanced and Low Pressure Chemical Vapor Deposited Amorphous Silicon

Authors: S.D. Brotherton, D.J. McCulloch, M.J. Edwards

299

Crystalline and Electrical Properties of Polysilicon Obtained by Annealing of Si Films Produced by Low Pressure Chemical Vapor Deposition from Si₂H₆

Authors: E. Campo, J.P. Guillemet, J.J. Pedroviejo, B. Legros-de Mauduit, E. Scheid

305

Determination of Crystallisation Parameters of a-Si from In Situ Conductance Measurements and Transmission Electron Microscopy Analysis

Authors: T. Kretz, R. Stroh, P. Legagneux, O. Huet, M. Magis, Didier Pribat

311

Grain Boundary Character Distribution in Rapidly Solidified and Annealed Silicon Ribbons

Authors: T. Watanabe, K.I. Arai, H. Terashima, H. Oikawa

317

Decomposition and Microstructure during Crystallization of Amorphous Ge_xSi_1-x Films

Authors: F. Edelman, Y. Komem, P. Werner, J. Heydenreich, S.S. Iyer

323

A Comparison of Polysilicon Produced by Excimer (ArF) Laser Crystallisation and Low-Temperature (600°C) Furnace Crystallisation of Hydrogenated Amorphous Silicon (a-Si:H)

Authors: T.E. Dyer, J.M. Marshall, W. Pickin, A.R. Hepburn, J.F. Davies

329

Microstructure and Transistor Properties of Solid-State-Crystallised Polysilicon: Effect of a Prolonged 600°C Anneal

Authors: J.L. Maurice, J. Dixmier, T. Kretz, P. Legagneux, F. Plais, Didier Pribat

335

The Art of Living with Defects in Silicon: Gettering and Passivation

Authors: R. Schindler

343

Hydrogen and Deuterium in Semi-Crystalline Silicon Wafers and Solar Cells

Authors: A.W. Weeber, H.H.C. de Moor, R.A. Steeman, W.C. Sinke, F. Schuurmans, P.-P. Michiels, L.A. Verhoef, P.F.A. Alkemade, E. Algra

355

External Gettering around Extended Defects in Multicrystalline Silicon Wafers

Authors: Santo Martinuzzi, I. Perichad, M. Stemmer

361

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