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Growth of n-Type Microcrystalline Silicon at Different Plasma Excitation Frequencies
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HomeSolid State PhenomenaSolid State Phenomena Vols. 51-52Growth of n-Type Microcrystalline Silicon at...

Growth of n-Type Microcrystalline Silicon at Different Plasma Excitation Frequencies

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Polycrystalline Semiconductors IV

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Periodical:

Solid State Phenomena (Volumes 51-52)

Pages:

161-166

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.51-52.161

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Online since:

May 1996

Authors:

P. Hapke, M. Luysberg, Reinhard Carius, M. Tzolov, F. Finger, H. Wagner

Keywords:

Microcrystalline Silicon Growth Process, TEM, VHF PECVD

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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