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HomeSolid State PhenomenaSolid State Phenomena Vols. 51-52Preparation of Low Temperature Polysilicon Films...

Preparation of Low Temperature Polysilicon Films with SiH₄ and SiF₄ Gas Mixtures

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Polycrystalline Semiconductors IV

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Periodical:

Solid State Phenomena (Volumes 51-52)

Pages:

149-154

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.51-52.149

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Online since:

May 1996

Authors:

H.S. Choi, K.H. Jang, Min Koo Han

Keywords:

Conductivity, Crystalline Fraction, Fluorine Precursor, Grain Boundary, Grain Growth

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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