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Electrically Active Near-Surface Implantation Defects in Silicon and GaAs
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Silicon Plates Homogeneity Diagnostics Method by Means of Semiconductor-Electrolyte Structure Surface Photovoltage Measurement

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Gettering and Defect Engineering in Semiconductor Technology III

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

457-460

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.457

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Online since:

January 1989

Authors:

A.O. Arackelyan, A.K. Arevyan, V.M. Arutyunyan, M.S. Kazaryan, V.A. Melicsetyan, V.L. Elbackyan

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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