Wet Preparation of Defect-Free Hydrogen-Terminated Silicon Wafer Surface and Its Characterization in Atomic-Scale

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Periodical:

Solid State Phenomena (Volumes 76-77)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

105-110

DOI:

10.4028/www.scientific.net/SSP.76-77.105

Citation:

T. Takahagi et al., "Wet Preparation of Defect-Free Hydrogen-Terminated Silicon Wafer Surface and Its Characterization in Atomic-Scale", Solid State Phenomena, Vols. 76-77, pp. 105-110, 2001

Online since:

January 2001

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Price:

$35.00

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