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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Detection and Identification of Organic...

Detection and Identification of Organic Contamination on Silicon Substrates

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

111-114

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.111

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Online since:

January 2001

Authors:

A. Roche, S. Marthon, J.F. Ple, Névine Rochat, Adrien Danel, M. Olivier, M. Juhel, F. Tardif

Keywords:

Characterization, Organic

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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