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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Preparation and Characterization of Time Dependent...

Preparation and Characterization of Time Dependent Haze on Silicon Surfaces

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

115-118

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.115

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Online since:

January 2001

Authors:

N. Münter, Bernd O. Kolbesen, W. Storm, Timo Müller

Keywords:

Adhesion, Contamination, Pulsed Force Mode

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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