Wet Cleaning of Trenches and Vias after Oxide/Nitride Dry Etch with Cu Exposed

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Periodical:

Solid State Phenomena (Volumes 76-77)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

311-0

DOI:

10.4028/www.scientific.net/SSP.76-77.311

Citation:

S. Verhaverbeke et al., "Wet Cleaning of Trenches and Vias after Oxide/Nitride Dry Etch with Cu Exposed", Solid State Phenomena, Vols. 76-77, pp. 311-0, 2001

Online since:

January 2001

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Price:

$35.00

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