The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

387-392

DOI:

10.4028/www.scientific.net/SSP.82-84.387

Citation:

M.J. Binns et al., "The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process", Solid State Phenomena, Vols. 82-84, pp. 387-392, 2002

Online since:

November 2001

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$35.00

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