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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Internal Gettering in Silicon: Experimental and...

Internal Gettering in Silicon: Experimental and Theoretical Studies Based on Fast and Slow Diffusing Metals

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

381-386

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.381

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Online since:

November 2001

Authors:

P. Geranzani, M. Pagani, C. Pello, G. Borionetti

Keywords:

Gettering Modeling, Internal Gettering, Iron, Lifetime, Nickel Ni, Oxygen Clusters, Oxygen Precipitates

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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