Nickel Gettering in Silicon: Role of Oxygen

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

355-360

DOI:

10.4028/www.scientific.net/SSP.82-84.355

Citation:

G. Regula et al., "Nickel Gettering in Silicon: Role of Oxygen", Solid State Phenomena, Vols. 82-84, pp. 355-360, 2002

Online since:

November 2001

Export:

Price:

$35.00

In order to see related information, you need to Login.