Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p+ Epitaxial Wafers

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

331-340

DOI:

10.4028/www.scientific.net/SSP.82-84.331

Citation:

M. B. Shabani et al., "Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p+ Epitaxial Wafers", Solid State Phenomena, Vols. 82-84, pp. 331-340, 2002

Online since:

November 2001

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Price:

$35.00

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