Dopant Segregation on Cavities Induced by Helium Implantation: The Case of Boron and Phosphorus

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

309-314

DOI:

10.4028/www.scientific.net/SSP.82-84.309

Citation:

F. Cayrel et al., "Dopant Segregation on Cavities Induced by Helium Implantation: The Case of Boron and Phosphorus", Solid State Phenomena, Vols. 82-84, pp. 309-314, 2002

Online since:

November 2001

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$35.00

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