Precipitation Kinetics and Recombination Activity of Cu in Si in the Presence of Internal Gettering Sites

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

323-330

DOI:

10.4028/www.scientific.net/SSP.82-84.323

Citation:

A. A. Istratov et al., "Precipitation Kinetics and Recombination Activity of Cu in Si in the Presence of Internal Gettering Sites", Solid State Phenomena, Vols. 82-84, pp. 323-330, 2002

Online since:

November 2001

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$35.00

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