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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Platinum Silicide Precipitate Formation During...

Platinum Silicide Precipitate Formation During Phosphorus Diffusion Gettering in Silicon

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

411-416

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.411

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Online since:

November 2001

Authors:

Michael Seibt, A. Döller, Vitaly V. Kveder, Andreas Sattler, A. Zozime

Keywords:

Gettering, Metal Impurities in Silicon, Phosphorus Diffusion, Platinum in Silicon, Silicide Precipitates

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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