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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Impact of a Cooling Process on the Dopant Activity...

Impact of a Cooling Process on the Dopant Activity of Platinum in Silicon

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

417-424

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.417

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Online since:

November 2001

Authors:

Laurent Ventura, Bernard Pichaud, Frédéric Lanois

Keywords:

Cooling Rate, Deep Level, Diffusion, Platinum, Silicon, Type Conversion

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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