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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Prospects for New Wafer Types and Materials in...

Prospects for New Wafer Types and Materials in Semiconductor Technology and Factors for their Successful Introduction

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Gettering and Defect Engineering in Semiconductor Technology X

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

665-0

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.665

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Online since:

September 2003

Authors:

Werner Bergholz, Jürgen Wittmann, Rainer Winkler, Helmut Tews, Roger Fehlhaber

Keywords:

Compound Semiconductor, Cost, Customer Value, Design Rule, Flatness, Gate Leakage, Gate Oxide Leakage, III-V Compound Semiconductors, Si Wafer, Silicon Carbide (SiC), Standardisation

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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