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4H-SiC PIN Diode as High Temperature Multifunction Sensor
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4H-SiC PIN Diode as High Temperature Multifunction Sensor

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Abstract:

An in-house fabricated 4H-SiC PIN diode that has both optical sensing and temperature sensing functions from room temperature (RT) to 550 °C is presented. The two sensing functions can be simply converted from one to the other by switching the bias voltage on the diode. The optical responsivity of the diode at 365 nm is 31.8 mA/W at 550 °C. The temperature sensitivity of the diode is 2.7 mV/°C at the forward current of 1 μA.

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Periodical:

Materials Science Forum (Volume 897)

Pages:

630-633

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.897.630

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Online since:

May 2017

Authors:

Shuo Ben Hou*, Per Erik Hellström, Carl Mikael Zetterling, Mikael Östling

Keywords:

4H-SiC, High Temperature, PiN Diode, Sensor

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© 2017 Trans Tech Publications Ltd. All Rights Reserved

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