Silicon Carbide, III-Nitrides and Related Materials
Materials Science Forum Volumes 264 - 268
doi:10.4028/www.scientific.net/MSF.264-268
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p57
Modelling of the PVT-SiC Bulk Growth Process Taking into Account Global Heat Transfer, Mass Transport and Heat of Crystallization and Results on its Experimental Verification
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246 K
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Authors: Stephan G. Müller, Robert Eckstein, Dieter Hofmann, L. Kadinski, P. Kaufmann, M. Kölbl, Erwin Schmitt
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p61
Modeling Analysis of Temperature Field and Species Transport Inside the System for Sublimation Growth of SiC in Tantalum Container
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257 K
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Authors: Yu.E. Egorov, A.O. Galyukov, S.G. Gurevich, Yuri N. Makarov, E.N. Mokhov, M.G. Ramm, M.S. Ramm, A.D. Roenkov, A.S. Segal, Yu.A. Vodakov, A.N. Vorob'ev, A.I. Zhmakin
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p65
A Coupled Finite Element Model for the Sublimation Growth of SiC
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190 K
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Authors: P. Råback, Risto M. Nieminen, Rositza Yakimova, M. Tuominen, Erik Janzén
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p69
Studies on SiC Liquid Phase Crystallization as Technique for SiC Bulk Growth
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450 K
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Authors: M. Müller, Matthias Bickermann, Dieter Hofmann, Arnd Dietrich Weber, Albrecht Winnacker
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p73
Dissolution and Growth of Silicon Carbide Crystals in Melt-Solutions
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236 K
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Authors: V. Ivantsov, Vladimir Dmitriev
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p77
Sublimation Growth of Bulk β-SiC Crystals on (100) and (111) β-SiC Substrates
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219 K
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Authors: H.N. Jayatirtha, Michael G. Spencer
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p83
SiC Epitaxial Layer Growth in a Novel Multi-Wafer VPE Reactor
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371 K
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Authors: Albert A. Burk, Michael J. O'Loughlin, S.S. Mani
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p89
Growth of SiC Epitaxial Layers in a Vertical Cold Wall Reactor Suited for High Voltage Applications
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536 K
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Authors: Roland Rupp, A. Wiedenhofer, Peter Friedrichs, Dethard Peters, Reinhold Schörner, Dietrich Stephani
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p97
Growth and Characterisation of SiC Power Device Material
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525 K
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Authors: Olof Kordina, Anne Henry, Erik Janzén
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p103
Growth and Characterisation of Thick SiC Epilayers by High Temperature CVD
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250 K
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Authors: Alexsandre Ellison, Tsunenobu Kimoto, Ivan G. Ivanov, Qamar-ul Wahab, Anne Henry, Olof Kordina, Jian Hui Zhang, Carl G. Hemmingsson, Chun-Yuan Gu, M.R. Leys, Erik Janzén
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p107
Growth of Thick Epitaxial 4H-SiC Layers by Chemical Vapor Deposition
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268 K
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Authors: Olof Kordina, Kenneth G. Irvine, Joseph J. Sumakeris, H.S. Kong, Michael J. Paisley, Calvin H. Carter Jr.
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p111
Impurity Incorporation Mechanism in Step-Controlled Epitaxy Growth Temperature and Substrate Off-Angle Dependence
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195 K
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Authors: T. Yamamoto, Tsunenobu Kimoto, Hiroyuki Matsunami
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p115
Nitrogen Doping Efficiency During Vapor Phase Epitaxy of 4H-SiC
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217 K
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Authors: L.B. Rowland, Albert A. Burk, C.D. Brandt
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p119
Boron Compensation of 6H Silicon Carbide
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258 K
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Authors: Michael S. Mazzola, Stephen E. Saddow, Adolf Schöner
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p123
CVD Growth and Characterisation of SiC Epitaxial Layers on Faces Perpendicular to the (0001) Basal Plane
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222 K
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Authors: Christer Hallin, Alexsandre Ellison, Ivan G. Ivanov, Anne Henry, Nguyen Tien Son, Erik Janzén