HOME CONTACT My eBook

Username: Password:

> @scientific.net

Gettering and Defect Engineering in Semiconductor Technology

Solid State Phenomena Volumes 19 - 20

• Papers
• Abstracts
• buy eBook

• p121 Point Defect Engineering for ULSI Silicide Processing   [ 903 K ]
  Authors: George A. Rozgonyi, J.W. Honeycutt
• p137 Defect Control and Gettering in Cz-Silicon   [ 863 K ]
  Authors: F.G. Kirscht, Eicke R. Weber, I. Babanskaya
• p169 Silicon Device Engineering by Intrinsic Point Defect Control   [ 292 K ]
  Authors: N.A. Sobolev, Yu.V. Vyzhigin, B.N. Gresserov, E.I. Sheck, A.I. Kurbakov, E.E. Rubinova, V.A. Trunov
• p175 Defect Engineering in a High-Voltage Substrate Technology   [ 297 K ]
  Authors: G. Kissinger, W. Kissinger, K. Tittelbach-Helmrich, U. Retzlaff, J. Knopke, K. Schmalz, G. Morgenstern
• p181 Thermal Wafer Warpage and its Avoidance   [ 350 K ]
  Authors: A. Fischer, Hans Richter
• p189 Defects in Crystalline Silicon - History and Outlook   [ 264 K ]
  Authors: E. Sirtl
• p195 Defect Spectroscopy in Compound Semiconductors   [ 628 K ]
  Authors: Hermann G. Grimmeiss, Mats Kleverman
• p207 Formation and Defect Structure of FeIn Pairs in Silicon   [ 401 K ]
  Authors: W. Gehlhoff, P. Emanuelsson, P. Omling, Hermann G. Grimmeiss
• p215 EPR Identification of Mn- or Cr-Acceptor Pairs in Silicon   [ 275 K ]
  Authors: J. Kreissl, W. Gehlhoff, K. Irmscher, P. Omling, P. Emanuelsson
• p221 The Influence of RTA on Deep States in Si-Implanted GaAs MESFET Structures Investigated by DLTS and ODLTS   [ 248 K ]
  Authors: F. Dubecky, T. Lalinsky
• p227 Study of Electron and Hole Emission from Deep States in Undoped Semi-Insulating GaAs by PICTS and Photo-DLTS   [ 41 K ]
  Authors: F. Dubecky, G. Papaioannou, V. Ioannou-Sougleridis, M. Baumgärtner
• p229 'New Donors' in Heat-Treated Cz-Si - What is Really New There?   [ 343 K ]
  Authors: Valentin V. Emtsev, Yu.N. Daluda, K. Schmalz
• p235 The Thermal Acceptor in Nitrogen Doped Cz Silicon   [ 198 K ]
  Authors: Di Sheng Yang, J. Lu, L. Li, H. Yao, Duan Lin Que
• p241 On Carbon-Implantation Induced Donors in Silicon   [ 243 K ]
  Authors: K. Schmalz, P. Gaworzewski, R. Winkler, Wolfgang Skorupa
• p247 A Search on the Identity of the Ev+0.34 eV C-Related Defect in p-Si   [ 297 K ]
  Authors: Charalamos A. Londos