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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 183-185Effect of Surface Proximity upon Point Defects in...

Effect of Surface Proximity upon Point Defects in Silicon

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Defects and Diffusion in Semiconductors III

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Periodical:

Defect and Diffusion Forum (Volumes 183-185)

Pages:

189-198

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.183-185.189

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Online since:

August 2000

Authors:

V. Krishnamoorthy, M. Puga Lambers, Kevin S. Jones

Keywords:

Arsenic, Clustering, Defect, Implantation, Interstitial, Microscopy, Precipitation, Silicon, Surface, Vacancy

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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