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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 183-185Analytical In-Diffusion Profiles of Dopants in...

Analytical In-Diffusion Profiles of Dopants in Semiconductors

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Defects and Diffusion in Semiconductors III

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Periodical:

Defect and Diffusion Forum (Volumes 183-185)

Pages:

231-0

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.183-185.231

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Online since:

August 2000

Authors:

E. Antoncik

Keywords:

Diffusion Coefficient, In-Diffusion, Profile, Reaction-Diffusion Equations

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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