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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 183-185Diffusion of Zinc in InP, InAsP and InGaAs by the...

Diffusion of Zinc in InP, InAsP and InGaAs by the Metal-Organic Vapor-Phase Diffusion Technique

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Defects and Diffusion in Semiconductors III

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Periodical:

Defect and Diffusion Forum (Volumes 183-185)

Pages:

153-162

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.183-185.153

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Online since:

August 2000

Authors:

M. Wada, K. Sakakibara, T. Umezawa, S. Nakajima, S. Araki, T. Kudou, T. Ueda

Keywords:

Diffusion, Dimethylzinc, InAsP, InGaAs, InP, Metal-Organic Source, Zinc

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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