1200 V 4H-SiC VDMOSFET Having > 2.5x On-Current Improvement

Article Preview

Abstract:

We experimentally demonstrated >2.5x on-current improvement on VDMOSFET fabricated in a standard 1200 V-rated 4H-SiC based VDMOSFET. The on-current improvement is achieved by applying a positive bias to the p-well region when the VDMOSFET is in the on-state. A >104 ratio between the on-current gain and the p-well current gain is shown. TCAD simulations are performed to study the underlying mechanisms of the on-current gain.

You have full access to the following eBook

Info:

* - Corresponding Author

[1] Uchida, K. et al., ISPSD (2015)

Google Scholar

[2] Kim, D. et al. IEEE Journal of the Electron Devices Society 10 (2022), pp.989-995.

Google Scholar

[3] Kim, J. J. et al., ISPSD (2024)

Google Scholar

[4] Han, K. and Baliga, B. J. 2019 IEEE Transactions on Electron Devices, 66(5), 2321-2326.

Google Scholar

[5] Masuda, T. et al. 2020 Materials Science Forum. vol. 1004, pp.758-763

Google Scholar

[6] Chen, C. et al. Microelectronics Reliability 55.9-10 (2015): 1708-1713

Google Scholar

[7] Sadik, D-P. et al. IEEE Transactions on Industrial Electronics 68.3 (2020): 2608-2616

Google Scholar