SiC Avalanche Photodiodes - Crystal Orientation and Spatial Uniformity

Daniel B. Habersat; Anand Sampath; Greg Garrett; Michael Derenge; Franklin Nouketcha; Brenda VanMil; Michael Wraback; Jonathan Schuster; Jeremy Smith; Enrico Bellotti; Mike Zhu; Reza Ghandi; Mehrnegar Aghayan

doi:10.4028/p-qsEbu9

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Dynamic Characterization and Robustness of SiС MOSFETs Based on SmartSiC^TM Engineered Substrates
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Device Performance and Reliability of SiC CMOS up to 400°C
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SiC Avalanche Photodiodes - Crystal Orientation and Spatial Uniformity
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Influence of Gold Nanoparticle Distribution on the Performance of Self-Powered Silicon Carbide Ultraviolet Photodetector
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Fabrication of 4H-SiC Low Gain Avalanche Detectors (LGADs)
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All Electrical Near-Zero Field Magnetoresistance Magnetometry up to 500°C Using SiC Devices
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SiC Avalanche Photodiodes - Crystal Orientation and Spatial Uniformity

Abstract:

We are investigating 4H-SiC avalanche photodiodes for use as solar-blind, single-photon UV detectors, which could enable low cost, size, weight, and power devices that are reliable and robust, suitable for many sensing applications. One concern for these devices is the spatially-nonuniform gain which limits the useful device area and impedes the scaling necessary to compete with leading UV sensor architectures. We examined various potential sources of the nonuniformity, and conclude that the typically observed phenomenon is likely caused by impact ionization anisotropy and the 4° wafer offcut angle needed to maintain a consistent polytype during epitaxial growth. Additionally, we present both linear and Geiger-mode spatial maps on the same devices to explain the observed differences in each.

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Periodical:

Key Engineering Materials (Volume 1024)

Pages:

67-72

DOI:

https://doi.org/10.4028/p-qsEbu9

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Online since:

September 2025

Authors:

Daniel B. Habersat*, Anand Sampath, Greg Garrett, Michael Derenge, Franklin Nouketcha, Brenda VanMil, Michael Wraback, Jonathan Schuster, Jeremy Smith, Enrico Bellotti, Mike Zhu, Reza Ghandi, Mehrnegar Aghayan

Keywords:

Avalanche, Photodiode, Single Photon, Spatial Uniformity, UV Detector

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Creative Commons CC BY 4.0

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* - Corresponding Author

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