Fabrication and Electrical Characterization of Epitaxially Grown (Ba,Sr)TiO3 Thin Films Prepared by Sol-Gel Method

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Epitaxially grown (Ba,Sr)TiO3 thin films were prepared on platinum-coated silicon substrate by sol-gel method using a (Ba,Sr)TiO3 sol derived from Ba(CH3COO)2, Sr(CH3COO)2 and Ti(O-i-C3H7)4. The morphology of the films was found to depend on the annealing condition. A columnar structure was obtained for (Ba,Sr)TiO3 thin film by annealing at 800 °C and a columnar grain was found to be single crystal by transmission electron microscope (TEM). The columnar grown film exhibits a preferred (111) orientation that follows the (111) orientation of Pt substrate. Measurement of the C-V in MFM was configured in order to demonstrate good dielectric properties. Obtained films showed high voltage tunability.

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Periodical:

Edited by:

Keiichi Katayama, Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

81-84

DOI:

10.4028/www.scientific.net/KEM.320.81

Citation:

T. Hosokura, A. Ando, Y. Sakabe, "Fabrication and Electrical Characterization of Epitaxially Grown (Ba,Sr)TiO3 Thin Films Prepared by Sol-Gel Method ", Key Engineering Materials, Vol. 320, pp. 81-84, 2006

Online since:

September 2006

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$35.00

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