The Deformation Mechanism at Pop-In: Monocrystalline Silicon under Nanoindentation with a Berkovich Indenter


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This paper investigates the “pop-in” behavior of monocrystalline silicon under nanoindentation with a Berkovich indenter. The indentation tests were carried out under ultra-low loads, i.e. 100 μN and 300 μN, with different loading/unloading rates. It was found that with the experimentally determined area function of the indenter tip, the mechanical properties of silicon can be accurately calculated from the load-displacement data, that a pop-in event represents the onset of phase transition, and that a lower loading rate favours a sudden volume change but a rapid loading process tends to generate a gradual slope change of the load-displacement curve.



Key Engineering Materials (Volumes 389-390)

Edited by:

Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara




L. Chang and L. C. Zhang, "The Deformation Mechanism at Pop-In: Monocrystalline Silicon under Nanoindentation with a Berkovich Indenter", Key Engineering Materials, Vols. 389-390, pp. 453-458, 2009

Online since:

September 2008




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