Advances in Precision Engineering

Volumes 447-448

doi: 10.4028/

Paper Title Page

Authors: Akihisa Kubota, Masahiko Yoshimura, Takashi Watayo, Yoshitaka Nakanishi, Mutsumi Touge

Abstract: We have developed advanced lapping and polishing methods for silicon carbide (SiC) substrates using an Fe abrasive particles and hydrogen...

Authors: Jun Zhan Hou, Wei Zhou, Ning Zhao

Abstract: Magnesium alloys have been increasingly used in automotive and aerospace components and in portable microelectronic devices due to their...

Authors: Akihiko Nemoto, Hitoshi Ohmori, Yasuhiko Murata, Nobuhide Itoh

Abstract: To cope with increasing demands on ultraprecision profiling and finishing of aspheric lens molds, we have implemented an ultra/...

Authors: J.C. Huang, Yung Jin Weng, Yung Chun Weng, Y.F. Chan, Hsu Kang Liu, H.S. Fang

Abstract: Electrochemical polish technology could enhance the chemo-mechanical polishing efficiency of copper material. During the electrochemical...

Authors: Toshimichi Moriwaki

Abstract: A new ultrasonic vibration cutting device for ultraprecision elliptical vibration cutting has been developed. The elliptical vibration...

Authors: Ning Lou, Ioan D. Marinescu, Michael C. Weismiller

Abstract: As demand for high-quality machined tools considerably grows, ELID, a new and efficient technology, has been successfully brought into the...

Authors: Hou Xiao Wang, Wei Zhou, Er Ping Li

Abstract: Nano-precision machining using focused ion beam (FIB) is widely applied in many fields. So far, FIB-based nanofabrication for specific...

Authors: Yuki Kaneko, Masanori Kunieda

Abstract: This research aims to develop a reverse simulation method to obtain the shape of tool electrode before machining from the shapes of...

Authors: Zhen Yu Zhang, Rudy Irwan, Han Huang

Abstract: Surface characteristics of CZT wafers machined using wire sawing, free abrasives lapping and polishing and ultra-precision grinding were...

Authors: Nan Nan Liu, Pei Ge Shao, Shripad R. Kulkarni, Jian Hong Zhao, Jeroen A. van Kan

Abstract: For applications of injection mould fabrication in the field of MEMS, proton beam writing (PBW) and UV lithography are combined to...


Showing 31 to 40 of 165 Paper Titles