Advanced 1200V SiC MOSFET Concept Based on Singular Point Source MOS (S-MOS) Technology

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Abstract:

This paper presents a Singular Point Source MOS (S-MOS) cell concept suitable for SiC MOSFETs targeting low conduction losses, low switching losses and high robustness. The S-MOS concept differs from standard Planar or Trench MOS cells in the manner by which the total channel width per device area is determined. For the proof of concept and device electrical performance evaluation, the paper will provide 2D and 3D TCAD simulations results for 1200V SiC MOSFETs including the S-MOS and reference planar and trench structures.

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Materials Science Forum (Volume 1062)

Pages:

539-543

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Online since:

May 2022

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[1] M.T. Rahimo Performance evaluation and expected challenges of Silicon Carbide power MOSFETs for high voltage applications, Mat. Science Forum, Vol. 897, pp.649-654, May (2017).

DOI: 10.4028/www.scientific.net/msf.897.649

Google Scholar

[2] D. Hisamoto, E. Takeda A fully depleted lean-channel transistor (DELTA). A novel vertical ultra-thin SOI MOSFET,, IEDM 1989, NewYork, pp.833-836.

DOI: 10.1109/iedm.1989.74182

Google Scholar

[3] N.Tega, H. Yoshimoto, D. Hisamoto, N. Watanabe, H. Shimizu, S. Sato, Y. Mori, T. Ishigaki, M. Matsumura, K. Konishi, K. Kobayashi, T. Mine, S. Akiyama, R. Fujita, A. Shima, and Y. Shimamoto Novel trench-etched double-diffused SiC MOS (TED MOS) for overcoming tradeoff between RonA and Qgd,, Proc. ISPSD 2015, Hong Kong, China, pp.81-84.

DOI: 10.1109/ispsd.2015.7123394

Google Scholar

[4] R. P. Ramamurthy, N. Islam, M. Sampath, D.T. Morisette, J. Cooper The Tri-Gate MOSFET: A New Vertical Power Transistor in 4H-SiC, Electron Device Letters, Vol. 42, No. 1, Jan. (2021).

DOI: 10.1109/led.2020.3040239

Google Scholar

[5] M.T. Rahimo I. Nistor, D. Green, Singular Point Source MOS Cell Concept (S-MOS) Implemented on a Narrow Mesa Trench IGBT,, Proc. ISPSD 2021, Nagoya, Japan, pp.27-30.

DOI: 10.23919/ispsd50666.2021.9452228

Google Scholar

[6] B. J. Baliga, Fundamentals of Power Semiconductor Devices,, New York: Springer, 2008, ISBN 978-0-387-47313-0.

Google Scholar