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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Surface Defects in GaN and AlxGa1-xN Epilayers...

Surface Defects in GaN and Al_xGa_1-xN Epilayers Deposited on Sapphire by Organometallic Vapor Phase Epitaxy

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

1251-1254

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.1251

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Online since:

February 1998

Authors:

Min Chul Shin, A.Y. Polyakov, Marek Skowronski, Gregory S. Rohrer, R.G. Wilson

Keywords:

Organometallic Vapor Phase Epitaxy, Surface Defect

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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