Thick Film SiC Epitaxy for 'Filling Up' Micropipes

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

167-170

DOI:

10.4028/www.scientific.net/MSF.264-268.167

Citation:

I.I. Khlebnikov et al., "Thick Film SiC Epitaxy for 'Filling Up' Micropipes", Materials Science Forum, Vols. 264-268, pp. 167-170, 1998

Online since:

February 1998

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Price:

$35.00

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