Paper Titles

Domain Occurance in SiC Epitaxial Layers Grown by Sublimation
p.151

Epitaxy of High Quality SiC Layers by CST
p.155

Wetting Properties and Interfacial Energies in Liquid Phase Growth of α-SiC
p.159

High Quality 6H- and 4H-SiC pn Structures with Stable Electric Breakdown Grown by Liquid Phase Epitaxy
p.163

Thick Film SiC Epitaxy for 'Filling Up' Micropipes
p.167

A New Radiation Heated 4 Inch LPCVD System for β-SiC Heteroepitaxy
p.171

Epitaxial Growth in 3C-SiC without Carbonization Process Using 1,3-Disilabutane
p.175

Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence
p.179

CVD Growth Mechanism of 3C-SiC on Si Substrates
p.183

HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Thick Film SiC Epitaxy for 'Filling Up' Micropipes

Thick Film SiC Epitaxy for 'Filling Up' Micropipes

Article Preview

Abstract:

You might also be interested in these eBooks

Silicon Carbide, III-Nitrides and Related Materials

Info:

Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

167-170

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.167

Citation:

Cite this paper

Online since:

February 1998

Authors:

I.I. Khlebnikov, V. Madangarli, M.A. Khan, Tangali S. Sudarshan

Keywords:

Micropipe, Micropipe Filling, Thick Film Epitaxy

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1998 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: