Crystallinity of 3C-SiC Films Grown on Si Substrates

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

191-194

DOI:

10.4028/www.scientific.net/MSF.264-268.191

Citation:

K. Yagi and H. Nagasawa, "Crystallinity of 3C-SiC Films Grown on Si Substrates", Materials Science Forum, Vols. 264-268, pp. 191-194, 1998

Online since:

February 1998

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$35.00

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