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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Transmission Electron Microscopy Investigation of...

Transmission Electron Microscopy Investigation of Defects in B-Implanted 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

413-416

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.413

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Online since:

February 1998

Authors:

P.O.Å. Persson, Qamar-ul Wahab, L. Hultman, Nils Nordell, Adolf Schöner, K. Rottner, E. Olsson, Margareta K. Linnarsson

Keywords:

Boron Implantation, Boron Precipitates, Electron Microscopy, Elemental Mapping, Planar Defects

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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