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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Effects of Oxidation Conditions on the...

Effects of Oxidation Conditions on the Concentration of Carbon Dangling Bonds in Oxidized 6H-SiC

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

1125-1128

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.1125

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Online since:

May 2000

Authors:

P.J. Macfarlane, Mary Ellen Zvanut

Keywords:

Carbon-Related Defects, Dry Heat-Treatment, Electron Paramagnetic Resonance (EPR), Thermal Oxidation

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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