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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Molding-based Thin Film Patterning Techniques for...

Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

1141-1144

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.1141

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Online since:

May 2000

Authors:

Xiao Yan Song, S. Guo, Christian A. Zorman, Chien-Hung Wu, A.A. Yasseen, Mehran Mehregany

Keywords:

Micro-Electromechanical System (MEMS), Micromolding, Polycrystalline SiC, Surface Micromachining

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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