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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Preliminary Investigation of SiC on Silicon for...

Preliminary Investigation of SiC on Silicon for Biomedical Applications

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

1149-1154

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.1149

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Online since:

May 2000

Authors:

G.E. Carter, Jeff B. Casady, J. Bonds, M.E. Okhuysen, James D. Scofield, Stephen E. Saddow

Keywords:

3C, Biomedical Probe, Microelectromechanical, Micro-Electromechanical System (MEMS), Reactive Ion Etching, RIE, SF₆

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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