Anisotropic Dielectric Function Properties of Semi-insulating 4H-SiC Determined from Spectroscopic Ellipsometry

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

571-574

DOI:

10.4028/www.scientific.net/MSF.338-342.571

Citation:

M. Kildemo et al., "Anisotropic Dielectric Function Properties of Semi-insulating 4H-SiC Determined from Spectroscopic Ellipsometry", Materials Science Forum, Vols. 338-342, pp. 571-574, 2000

Online since:

May 2000

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$35.00

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