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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Correlation between DLTS and Photoluminescence in...

Correlation between DLTS and Photoluminescence in He-implanted 6H-SiC

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

753-756

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.753

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Online since:

May 2000

Authors:

Thomas Frank, Gerhard Pensl, Song Bai, Robert P. Devaty, Wolfgang J. Choyke

Keywords:

DLTS, Implantation-Induced Defects, LTPL

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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