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Micropipe Closing via Thick 4H-SiC Epitaxial Growth Involving Structural Transformation of Screw Dislocations
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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Micropipe and Macrodefect Healing in SiC Crystals...

Micropipe and Macrodefect Healing in SiC Crystals during Liquid Phase Processing

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

307-310

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.307

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Online since:

January 2001

Authors:

Boris M. Epelbaum, Dieter Hofmann, U. Hecht, Albrecht Winnacker

Keywords:

Defect Elimination, Hollow Defects, Liquid Phase Epitaxy (LPE), Micropipe

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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