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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Micropipe Closing via Thick 4H-SiC Epitaxial...

Micropipe Closing via Thick 4H-SiC Epitaxial Growth Involving Structural Transformation of Screw Dislocations

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

311-314

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.311

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Online since:

January 2001

Authors:

Isaho Kamata, Hidekazu Tsuchida, Tamotsu Jikimoto, Kunikaza Izumi

Keywords:

4H-SiC, Elementary Screw Dislocations, Epitaxial Growth, Micropipe, Micropipe Closing, Structural Transformation

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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