High-Resolution XRD Evaluation of Thick 4H-SiC Epitaxial Layers

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

291-294

DOI:

10.4028/www.scientific.net/MSF.353-356.291

Citation:

H. Jacobsson et al., "High-Resolution XRD Evaluation of Thick 4H-SiC Epitaxial Layers", Materials Science Forum, Vols. 353-356, pp. 291-294, 2001

Online since:

January 2001

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$35.00

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