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Optical Characterization of SiC Materials: Bulk and Implanted Layers
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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Optical Characterization of SiC Materials: Bulk...

Optical Characterization of SiC Materials: Bulk and Implanted Layers

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

335-340

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.335

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Online since:

January 2001

Authors:

Jean Camassel, Patrice Vicente, L. Falkovski

Keywords:

Implantation Damage, Micro-Raman Spectroscopy, Subsurface Damage, Wafering

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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