Differentiation between C and Si Related Damage Centres in 4H- and 6H-SiC by the Use of 90-300 kV Electron Irradiation Followed by Low Temperature Photoluminescence Microscopy

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Periodical:

Materials Science Forum (Volumes 353-356)

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381-384

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Online since:

January 2001

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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