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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Surface Morphology and Chemistry of 4H- and 6H-SiC...

Surface Morphology and Chemistry of 4H- and 6H-SiC after Cyclic Oxidation

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

1101-1104

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.1101

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Online since:

April 2002

Authors:

Robert S. Okojie, Dorothy Lukco, Luann Keys, Sergey P. Tumakha, Leonard J. Brillson

Keywords:

Atomic Force Microscope (AFM), CLS, LEEN, Oxidation, Surface Chemistry, Surface Morphology, X-Ray Photoelectron Spectroscopy (XPS)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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