Heteroepitaxial Growth and Characteristics of 3C-SiC on Large-Diameter Si(001) Substrates

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

319-322

DOI:

10.4028/www.scientific.net/MSF.389-393.319

Citation:

H. Nagasawa et al., "Heteroepitaxial Growth and Characteristics of 3C-SiC on Large-Diameter Si(001) Substrates", Materials Science Forum, Vols. 389-393, pp. 319-322, 2002

Online since:

April 2002

Export:

Price:

$35.00

In order to see related information, you need to Login.