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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Comparative Study of Heteroepitaxially and...

Comparative Study of Heteroepitaxially and Homoepitaxially Grown 3C-SiC Films

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

323-326

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.323

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Online since:

April 2002

Authors:

Tetsuo Takahashi, Yuuki Ishida, Hidekazu Tsuchida, Isaho Kamata, Hajime Okumura, Sadafumi Yoshida, Kazuo Arai

Keywords:

3C-SiC, Atomic Force Microscope (AFM), Heteroepitaxy, Low-Pressure CVD, Photoluminescence (PL), X-Ray Diffraction (XRD)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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