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Laser Crystallization Mechanism of Amorphous SiC Thin Films

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Silicon Carbide and Related Materials 2001 View Preview

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

871-874

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.871

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Online since:

April 2002

Authors:

S. Urban, Fritz Falk, T. Gorelik, Ute Kaiser

Keywords:

Crystallization, Laser Processing, Silicon Carbide (SiC)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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