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Oxidation of Silicon Carbide: Problems and Solutions

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Silicon Carbide and Related Materials 2001 View Preview

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

961-966

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.961

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Online since:

April 2002

Authors:

Valeri V. Afanas'ev, M. Bassler, Gerhard Pensl, Andre Stesmans

Keywords:

Electrical Degradation, SiC/Oxide Interfaces, Thermal Oxidation

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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