Dll PL Intensity Dependence on Dose, Implantation Temperature and Implanted Species in 4H- and 6H-SiC

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

345-348

DOI:

10.4028/www.scientific.net/MSF.433-436.345

Citation:

F.H.C. Carlsson et al., "Dll PL Intensity Dependence on Dose, Implantation Temperature and Implanted Species in 4H- and 6H-SiC", Materials Science Forum, Vols. 433-436, pp. 345-348, 2003

Online since:

September 2003

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